ANFF

Description

Established in 2007, under the National Collaborative Research Infrastructure Strategy (NCRIS), the Australian National Fabrication Facility (ANFF) links 7 university-based nodes to provide researchers and industry with access to state-of-the-art fabrication facilities.

The capability provided by ANFF enables users to process hard materials (metals, composites and ceramics) and soft materials (polymers and polymer-biological moieties) and transform these into structures that have application in sensors, medical devices, nanophotonics and nanoelectronics.

The nodes, which are located across Australia, draw on existing infrastructure and expertise. Each offers a specific area of expertise including advanced materials, nanoelectronics & photonics and bio nano applications. Our commitment to providing a world-class user facility is underpinned by the sharing of best practise in service provision across the nodes.

The ANFF ACT node comprises facilities at the Australian National University and the University of Western Australia. These facilities are based on photonic / electronic materials growth, processing and fabrication of devices including micro electromechanical systems (MEMS). The node provides a range of capabilities and services for the micro/ nanofabrication of photonic and related devices as well as the fabrication of waveguides and photonic crystals.

Optoelectronic devices such as semiconductor lasers, photodetectors and modulators are widely used for communications, data storage and medical applications. Further, photonic crystals, with their ability to confine light and guide and control its propagation, promise an entire suite of ultra-compact optical devices analogous to those of semiconductor electronics. Hence the node is internationally recognised for supporting both state-of-the-art research and proof of concept development for industry.

At UWA access is provided to state-of-the-art fabrication facilities for optical MEMS and infrared sensor technology. Fabrication of micro electromechanical systems (MEMS) brings together modified semiconductor fabrication techniques, such as, molecular beam epitaxy (MBE), combined with micromachining to produce devices. Applications of the technology include automotive, defence, and communications.

The capability includes II-VI semiconductor growth by MBE and clean room micro / nano fabrication facilities (ICP/RIE, thin film deposition, etching, optical lithography, wire bonding and packaging) for the fabrication of nano / micro electromechanical systems (NEMS/MEMS).

Instrumentation Available

  • Molecular Beam Epitaxy System.
  • Optical Lithography
  • PECVD Deposition Systems
  • E-beam and thermal evaporators
  • Reactive Ion Etching
  • Inductively Coupled Plasma Etching & Deposition
  • Rapid Thermal Annealing
  • Wire-Bonder
  • I-V, C-V, DLTS, Hall Effect Measurement Systems
  • Optical and MEMS Characterisation Facilities

Accessing the WACSOM facility

The ANFF provides leading-edge research capability and supports excellence in science. It has a strong emphasis on service provision to the research community. ANFF seeks to enhance national and international collaborations and enable world-class-research by providing access:

  • in accordance with the published access and pricing policy;
  • that takes into account the long-term strategic requirements of relevant research disciplines; and
  • on the basis of merit in accordance with the norms and expectations of the research community.

Access to the ANFF may take place in a variety of ways, principally:

  • Direct access to instrumentation based on an hourly rate, or
  • Fee-for-service, for example the production of specialty optical fibres or photomasks

Dedicated staff are on hand to provide either services or training & technical support to users where appropriate. Industry access at commercial rates is available for proprietary research. Research collaborations and contract R&D or consulting are also welcomed.

Prior to submitting an application, users are encouraged to discuss their requirements with WACSOM to ensure the program design and requirements are a good fit to the facilities available. Scientific merit and feasibility are considered during these initial scoping discussions. Importantly, all publicly funded researchers are treated equally regardless of host institution.

The pre-visit interactions with WACSOM staff enable users to optimise their proposals and ensure that the time spent in the node is effective and successful. To initiate contact with WACSOM please consult and use:

initial contact form, ANFF Access Policy, WACSOM Pricing Scheme.

Publication & Acknowledgement

When presenting or publishing research that has involved the use of WASCOM facilities via the ANFF initiative, the user is required to include a statement acknowledging this, plus any WACSOM collaboration or technical support. The user is required to inform WACSOM in the event of presenting or publishing such research.

Please use this text on all posters and publications that have resulted from use of WASCOM facilities via the ANFF initiative:

"This work was performed in part at the ACT node of the Australian National Fabrication Facility. A company established under the National Collaborative Research Infrastructure Strategy to provide nano and microfabrication facilities for Australia's researchers"

The WACSOM staff frequently make major contributions to the research carried out by users utilising ANFF framework. They can have an important scientific role through the planning and realisation of experiments, through the analysis and interpretation of data, or through full collaboration in the research. When this occurs, the staff member is to be included as a co-author on papers.